Power of Intelligent New Technology
Probe Type | Ⅰ | Ⅱ | Ⅲ | Ⅳ | |
---|---|---|---|---|---|
Probe size | 56 ㎛ ×56 ㎛ | 58 ㎛ ×61 ㎛ | 58 ㎛ ×61 ㎛ | 70 ㎛ ×70 ㎛ | |
Beam Q’ty | 3EA | 3EA | 4 EA | 4 EA | |
Beam width (㎛) | 13.5㎛ | 13.5㎛ | 9 | 12.5㎛ | |
Beam space | 7.75㎛ | 7.75㎛ | 6.33㎛ | 6.5㎛, 7㎛, 6.5㎛ | |
Beamlength | 2,300㎛ | 1,300㎛ | 2,300㎛ | ||
Overalllength | 4,411㎛ | 3,411㎛ | |||
Materialcontents | Au : 28㎛, Pd_Co: 28㎛ (5:5) | Au : 30.5㎛, Pd_Co : 30.5㎛ (5:5) | Au : 30.5㎛, Pd_Co : 30.5㎛ (5:5) | Pd_Co : 35㎛, Au:35㎛ (5:5) Pd_Co : 28㎛, Au:42㎛ (4:6) |
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PredictedC.C.C | After Au flash | ≥ 1.7A | ≥ 1.95A | ≥ 2.1A | ≥ 2.3A |
Probeforce | 2.5 ± 0.3gf | 2.9 ±0.3gf | 2.0±0.3gf | 2.5 ± 0.3gf |