Technology

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AAO technology

Introduction

AAO(Anodic Aluminum Oxide) is an oxide film obtained through the electro-chemical reaction of aluminum. It is composed of Al2O3 and is a ceramic functional material with the characteristics of forming nanometer-sized pores uniformly aligned from the surface of the film to inside.

Introduction
Process
process
Benefit of PEC AAO
  • Able to use wet-etch process to produce high aspect ratio parts
  • Able to produce up to 12” diameter AAO wafers with 100um thickness
  • Excellent heat resistance (up to 900°C)
Benefit of PEC AAO
MEMS Performances
MEMS Performances
MEMS Performances
MEMS Performances
MEMS Performances