Introduction

AAO(Anodic Aluminum Oxide) is an oxide film obtained through the electro-chemical reaction of aluminum. It is composed of Al2O3 and is a ceramic functional material with the characteristics of forming nanometer-sized pores uniformly aligned from the surface of the film to inside.

Process

Benefit of PEC AAO

• Able to use wet-etch process to produce high aspect ratio parts
• Able to produce up to 12” diameter AAO wafers with 100um thickness
• Excellent heat resistance (up to 900°C)

MEMS Performances