Technology

Power of Intelligent New Technology

AAO technology

Benefit of PEC AAO
High aspect ratio
High aspect ratio
Heat resistance
Heat resistance
Over 100um thickness
Over 100um thickness
Benefit of PEC AAO
  • Able to use wet-etch process to produce high aspect ratio parts
  • Able to produce up to 12” diameter AAO wafers with 100um thickness
  • Excellent heat resistance (up to 900°C)
MEMS Performances
MEMS Performances
MEMS Performances
MEMS Performances
MEMS Performances
Application
  • PEC mold
  • Etc.