Power of Intelligent New Technology

MEMS technology

PEC enable to satisfy various needs of customers with
its own process technology such as precision patterning,
etching and deposition, and the know-how of system operation.

기술과 시스템 운용 노하우
MEMS foundry service
  • Photolithography : 4-inch, 6-inch, 8-inch, front & back alignment available
  • Dry film liminator : Vacuum/Roll type
  • Metal or metal-oxide compound Deposition(Sputter) : Sputter Ti, Ta, Au, Ag, W, TiOx, TaOx
  • Dry Etching(ME-RIE) : Al, Pt, Ta, Metal-Oxide(TaOx, TiOx)
  • Electro/Electroless Plating
  • Dicing(Blade type)
  • Analysis : SEM/EDS, CD-SEM(8", in-line system)

Optical analysis(Micro scope, Infrared analysis)

Electrical measurements(Source meter, Power supply, Pulse generator, etc)