Technology

Power of Intelligent New Technology

MEMS technology

PEC enable to satisfy various needs of customers with
its own process technology such as precision patterning,
etching and deposition, and the know-how of system operation.

기술과 시스템 운용 노하우
MEMS foundry service
  • Photolithography : 4-inch, 6-inch, 8-inch, front & back alignment available
  • Dry film liminator : Vacuum/Roll type
  • Metal or metal-oxide compound Deposition(Sputter) : Sputter Ti, Ta, Au, Ag, W, TiOx, TaOx
  • Dry Etching(ME-RIE) : Al, Pt, Ta, Metal-Oxide(TaOx, TiOx)
  • Electro/Electroless Plating
  • Dicing(Blade type)
  • Analysis : SEM/EDS, CD-SEM(8", in-line system)

Optical analysis(Micro scope, Infrared analysis)

Electrical measurements(Source meter, Power supply, Pulse generator, etc)