
AAO Technology
AAO(Anodic Aluminum Oxide), is a self-ordered aluminum oxide made by anodizing process.

Characteristics of an AAO
- Porous structure: Uniformly aligned 30-50nm pores
- Al2O3 ceramic material available for selective wet etching
AAO Wafer
Size Comparison

MEMS Performances

50um

200um

50um

50um