point engineering

AAO Technology

AAO(Anodic Aluminum Oxide), is a self-ordered aluminum oxide made by anodizing process.

Characteristics of an AAO

  • Porous structure: Uniformly aligned 30-50nm pores
  • Al2O3 ceramic material available for selective wet etching

Differentiated technology of PEC AAO

  • PEC is the only company in the world, who can mass produce AAO wafers in a large size (~12”).
  • PEC is the only company in the world, who manufactures probe pins from AAO wafer with application of MEMS & plating technology.
High aspect ratio
Heat resistance
Up to 150um thickness

AAO Wafer
Size Comparison

MEMS Performances

50um

200um

50um

50um

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